| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 549276 | Microelectronics Reliability | 2012 | 8 Pages |
In this paper, the RF performance for Gate Material Engineered-Trapezoidal Recessed Channel (GME-TRC) MOSFET has been investigated and the results so obtained are compared with Trapezoidal Recessed Channel (TRC) MOSFET and Rectangle Recessed Channel (RRC) MOSFET, using device simulators; ATLAS and DEVEDIT. Further, the impact of technology parameter variations in terms of negative junction depth (NJD), gate metal workfunction difference, substrate doping (NA) and corner angle, on GME-TRC MOSFET has also been evaluated. The simulation study shows the increase in transconductance and decrease in parasitic capacitance, which further contributes towards a significant improvement in cut-off frequency (ft) in GME-TRC MOSFET as compared to conventional TRC and RRC MOSFETs. Moreover, the significant enhancement in maximum available power gain (Gma), maximum transducer power gain (GMT), maximum unilateral power gain (MUG), maximum frequency of oscillation (fMAX) and stern stability factor (K) have also been observed for GME-TRC MOSFET due to reduced short channel effects (SCEs) and enhanced current driving capabilities. Further, the experimental data for grooved gate MOSFET has also been verified with the simulated data and a good agreement between their results is obtained.
► GME-TRC MOSFET exhibits superior RF performance as compared to TRC MOSFET. ► GME-TRC exhibits enhanced ft, Gma, GMT, MUG, fMAX and K. ► Technology parameter variations such as: NJD, FM2, NA and corner angle on GME-TRC has evaluated.
