Electrical characterization of aluminium oxide–aluminium thin film composites by impedance spectroscopy

The impedance spectroscopy method has been used for diagnostics of the thin film sandwich structures containing two aluminium electrodes with the composite deposited between them. The aluminium oxide–aluminium composite was deposited in the high effective reactive pulsed magnetron sputtering process. The aim of the investigation was to obtain the metal–oxide composite layer in single magnetron sputtering process. The main purpose of presented research was to characterize the impedance of presented structure in the wide range of frequency. The electrical equivalent circuit of measured structures was described and led to the identification of the dielectric relaxation processes.