Article ID Journal Published Year Pages File Type
549635 Microelectronics Reliability 2009 6 Pages PDF
Abstract

A new thick-film photoimageable platinum paste has been elaborated. The paste is less sensitive to the visible light. The resolution line/space 20/30 μm is achievable. The application of the elaborated paste to produce heaters is demonstrated. The stability of the heaters has been evaluated.

Related Topics
Physical Sciences and Engineering Computer Science Hardware and Architecture
Authors
, , , , , ,