Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
549635 | Microelectronics Reliability | 2009 | 6 Pages |
Abstract
A new thick-film photoimageable platinum paste has been elaborated. The paste is less sensitive to the visible light. The resolution line/space 20/30 μm is achievable. The application of the elaborated paste to produce heaters is demonstrated. The stability of the heaters has been evaluated.
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
Selim Achmatowicz, Konrad Kiełbasiński, Elżbieta Zwierkowska, Iwona Wyżkiewicz, Valentinas Baltrušaitis, Małgorzata Jakubowska,