Article ID Journal Published Year Pages File Type
6947458 Microelectronics Reliability 2011 6 Pages PDF
Abstract
► In this study we observe ageing mechanisms of the metallisation layer deposited on the chips of power semiconductor devices. ► We also study the effect of aluminium metallisation degradation on electrical performances of a power transistor. ► The resistance of the metallization layer is measured during ageing process. ► Increase in the metallisation resistance is linked to the degradation of the aluminium layer.
Related Topics
Physical Sciences and Engineering Computer Science Hardware and Architecture
Authors
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