| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 6947487 | Microelectronics Reliability | 2011 | 5 Pages |
Abstract
⺠We demonstrate an active restoring mechanism for stuck RF-MEMS switches. ⺠We established a measurement procedure for testing RF-MEMS switches with heaters. ⺠We demonstrate the effectiveness of the embedded micro-heaters pulsed activation. ⺠We developed a simulation procedure/methodology for RF-MEMS devices with heaters. ⺠Mechanical constraints are included for extracting heat-induced restoring forces.
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Authors
J. Iannacci, A. Faes, A. Repchankova, A. Tazzoli, G. Meneghesso,