Article ID Journal Published Year Pages File Type
6947493 Microelectronics Reliability 2011 4 Pages PDF
Abstract
The bulk discharge current density has been found to be in the order of picoampere per unit area, a value that is much lower than any previously reported one. It has been also found that it obeys the stretched exponential law and its parameters depend on the polarity of the polarized field. A greater bulk discharge current has been found in case of positive stressing bias.
Related Topics
Physical Sciences and Engineering Computer Science Hardware and Architecture
Preview
Determination of bulk discharge current in the dielectric film of MEMS capacitive switches
Authors
, ,