Robust independent modal space control of a coupled nano-positioning piezo-stage

In order to accurately control a coupled 3-DOF nano-positioning piezo-stage, this paper designs a hybrid controller. In this controller, a hysteresis observer based on a Bouc-Wen model is established to compensate the hysteresis nonlinearity of the piezoelectric actuator first. Compared to hysteresis compensations using Preisach model and Prandt-Ishlinskii model, the compensation method using the hysteresis observer is computationally lighter. Then, based on the proposed dynamics model, by constructing the modal filter, a robust H∞ independent modal space controller is designed and utilized to decouple the piezo-stage and deal with the unmodeled dynamics, disturbance, and hysteresis compensation error. The effectiveness of the proposed controller is demonstrated experimentally. The experimental results show that the proposed controller can significantly achieve the high-precision positioning.