Towards characterisation of millimetre length waveguides and new fabrication method for nanoscale diamond photonic structures

We present a novel approach to achieving in-plane coupling for ridge waveguides fabricated in single crystal diamond through a modification to the graphitic implant process. The etched cross-section of a diamond ridge structure is examined to confirm roughness estimates and the trenching effect. Finally nanoscale optical cavities are fabricated in polycrystalline diamond using a new method of exposure using focussed ion beam as a hard mask to pattern the structures.

Research Highlights► Masked ion implant and PDMS case used fabricating diamond waveguides. ► Diamond waveguides cover greater surface area of diamond crystal. ► Slot-waveguide cavity structures fabricated with focussed ion beam hard mask. ► TEM used to characterise waveguide structures in diamond.