Article ID Journal Published Year Pages File Type
9671944 Microelectronics Journal 2005 4 Pages PDF
Abstract
We describe the implementation of a chemical vapor deposition (CVD) apparatus for the synthesis of carbon nanotubes using ethanol as carbon source and evaluate several substrate materials. Carbon nanotubes are observed to form on various substrates at 750 °C after 20 min of ethanol flow. We examine substrates such as quartz, conductive glass (SnO2:F film deposited on soda-lime glass), porous alumina and nickel plates. As catalysts, we assess the use of cobalt and iron particles obtained from dried ethanol solutions of the corresponding acetates. Our samples are analyzed with Raman spectroscopy as well as with scanning electron microscopy.
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Physical Sciences and Engineering Computer Science Hardware and Architecture
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