Determination of self-heating and thermal resistance in polycrystalline and bulk silicon resistors by DC measurements

Self-heating of silicon resistors (fabricated in polycrystalline and bulk silicon) which are used as passive devices in analog circuits and as ESD-Protection elements is characterised in this work by purely DC measurements. A methodology using the device simultaneously as heater and temperature sensor is presented. Extraction of thermal resistance is derived and discussed. Different types of resistors including a wide range of different geometries are characterised, the geometry dependence of the thermal resistance is determined for different resistor types. Theoretical models describing geometry dependence for thermal resistance are in very good agreement with the presented results.