A contribution towards model-based design of application-specific MEMS

The design process of heterogeneous systems containing electro-mechanical components and electronic circuits involves expert knowledge, methods, and tools from different engineering domains. Cost-efficient research and development of such heterogeneous systems requires a systematic design flow without gaps. A contribution towards this global goal is presented in this article. A development and synthesis tool for one-dimensional accelerometer MEMS has been implemented, calculating sensor solutions and generating the models and layouts required for a hierarchical design flow in an automatic, module-based approach. Utilizing this flow, different accelerometers have been designed, manufactured, and characterized. A dedicated readout ASIC was developed to validate their dynamic behaviour.