Dynamic characteristics of membrane displacement of a bidirectional electromagnetic microactuator with microcoil fabricated on a single wafer

In the experiments the membrane is actuated in free air by applying pulses of voltages through the microcoil (Vcoil). The results show that there is a transition between two distinguished regions: a region when dm is dependent on both Icoil and tb, and the other region when dm is dependent only on Icoil. The transition happened when tb ≈ 1/2 · fn; where fn is the natural frequency of the membrane.