Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10364410 | Microelectronic Engineering | 2011 | 4 Pages |
Abstract
Optical ridge waveguide using calcium barium niobate (CBN) on silicon substrate for the first time is designed, fabricated and characterized for future integrated electro-optic devices. To obtain single-mode propagation, the CBN thin strip is designed to be surrounded by thick silicon dioxide layer forming a ridge waveguide. Deposition of CBN film on profiled silicon dioxide introduces spatial separation which solves the CBN etching problem. Fabrication, edge polishing and near-field mode profile measurement of the waveguide are carried out. The measurement is in good agreement with the simulation and an exact loss as low as 2.15Â dB/cm was obtained for the fabricated waveguide.
Keywords
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Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
Ebrahim Mortazy, Irina Stateikina, Amirhossein Tehranchi, Sébastien Delprat, Mohamed Chaker, Ke Wu,