Article ID Journal Published Year Pages File Type
4970746 Microelectronic Engineering 2017 7 Pages PDF
Abstract
Electron beam lithography of a 2-D artificial lattice in a silicate thin film, which was produced by localized electric fields in scanning transmission electron microscopy.526
Keywords
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Physical Sciences and Engineering Computer Science Hardware and Architecture
Preview
Local electric field direct writing - Electron-beam lithography and mechanism
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