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Impact of gate impedance on dielectric breakdown evaluation for 28 nm FDSOI transistors

Article ID Journal Published Year Pages File Type
4970805 Microelectronic Engineering 2017 5 Pages PDF
Abstract
The figure shows normal distribution of the OFF-current before and after breakdown in 28 nm FDSOI transistors, where Rg play an important role by controlling the gate current leakage after breakdown.343
Keywords
FDSOITDDBReliability
Related Topics
Physical Sciences and Engineering Computer Science Hardware and Architecture
Preview
Impact of gate impedance on dielectric breakdown evaluation for 28 nm FDSOI transistors
Authors
Amer Diab, Xavier Garros, Mustapha Rafik, Xavier Federspiel, Emmanuel Vincent, Gilles Reimbold,
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Journal
Microelectronic Engineering
Journal: Microelectronic Engineering
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