Article ID Journal Published Year Pages File Type
4970906 Microelectronic Engineering 2017 6 Pages PDF
Abstract

•A transfer printing technique has been developed to pattern embedded carbon nanotubes onto PDMS.•Patterns show good uniformity, forming an embedded CNT network.•A highly flexible two dimensional force sensor has been demonstrated, showing the pressure map applied.

This paper presents a two dimensional force sensor fabricated on PDMS nanocomposite, with patterned carbon nanotubes (CNTs) acting as a force sensing unit. A novel fabrication method is composed of inkjet printing of CNTs onto polyethylene terephthalate (PET) and subsequent transfer of the CNT patterns to PDMS, resulting in a CNT-elastomer nanocomposite that is flexible and conductive. This approach allows patterning of a large-area conductive carbon nanotube pattern on PDMS. The achieved sheet resistance of the transferred patterns on PDMS was 1.2 kΩ/□ when printed 35 times, using an office inkjet printer. The fabricated sensor changes its resistance when force is applied perpendicularly to the sensor. A two dimensional force sensor, working on the principle of compression-induced deformation was fabricated and characterized with achieved resolution of four sensing cells per cm2. Additionally, we demonstrate a two dimensional flexible force sensor capable of creating a pressure map of the applied force. Together with inkjet printing, this pattern transfer process represents a highly effective patterning technique for embedding carbon nanotubes in PDMS.

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Physical Sciences and Engineering Computer Science Hardware and Architecture
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