| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 4970932 | Microelectronic Engineering | 2017 | 27 Pages |
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
Andre Mayer, Dainel Blenskens, Johannes Rond, Christian Steinberg, Marc Papenheim, Si Wang, Joachim Zajadacz, Klaus Zimmer, Hella-Christin Scheer,