| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 4971107 | Microelectronic Engineering | 2017 | 5 Pages |
Abstract
Scanning electron microscopy images of SML liftoff results for dense (left) and larger grating period (right) using ZED-N50 developer.
Keywords
Related Topics
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Hardware and Architecture
Authors
A. Aassime, F. Bayle, M.P. Plante, F. Hamouda,