The fabrication of carbon nanotube electronic circuits with dielectrophoresis

•Single-walled carbon nanotube mesh networks can be aligned and deposited with dielectrophoresis.•Electronic circuits can be fabricated using the p-type carbon nanotube field-effect transistors.•The dielectrophoresis method could be used for the wafer-scale fabrication of carbon nanotube-based nanoelectronics.

Single-walled carbon nanotubes (SWCNTs) are used widely in fabricating nanoelectronic devices because of their unique electrical properties. In this paper, we report the fabrication of carbon nanotube field-effect transistors (CNTFETs)-based inverter and ring oscillator electronic circuits using the dielectrophoresis (DEP) method. The electrical property of fabricated CNTFET-based devices was measured. The CNTFET-based inverter shown electrical transfer characteristics, while the CNTFET-based ring oscillator demonstrated oscillation characteristics, denoting that the CNTFET-based circuits can function well for the application of electronic circuits. The DEP-based fabrication method is scalable, and could be used for the wafer-scale fabrication of carbon nanotube electronic circuits.

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