| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 539090 | Microelectronic Engineering | 2014 | 5 Pages |
Abstract
- Suspended 2D Si PhC slabs were fabricated using optimized nanoscale pattern transfer.
- PhC airholes were sealed with a SiO2 layer deposited by glancing angle deposition.
- The capping layer comprises inverted nanotips coalesced at a thickness of 260Â nm.
- The capped PhC slab can be used to develop integrated optofluidics and photonics.
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
H. Andagana, X.A. Cao,