| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 539157 | Microelectronic Engineering | 2015 | 7 Pages |
•We developed an atmospheric-pressure plasma jet device based on electric field dispersion.•The nitrogen, air, and argon plasma were ejected from the plasma jet nozzles.•The temperature of the plasma jet was kept near the room temperature during the treatment time.•By measurement of the UV intensity verified the stability of the device.•For application to the biomedical field was confirmed that the generation of NO and ozone in plasma.
A nonthermal atmospheric-pressure plasma jet device based on electric-field dispersion was proposed, fabricated and tested. The device has nickel electrodes with micro-size holes fabricated via micromachining process. It was confirmed from the optical emission spectrum (OES) of the plasma jet that the generated reactive species depend on the gas and the intensities of the species depend on the hole size. Also, we measured the concentration of NO in plasma jet as well as the concentration of ozone dissolved in typical cell culture media for biomedical applications. For the characterization, the electron density and electron temperature of the plasma were calculated from the voltage and the current measured during the plasma discharge. Above all, we observed that the electrodes of the proposed device stands long and generate plasma stably compared to the previous devices without electric-field dispersion.
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