Lift-off patterning of multi-walled carbon nanotube and PEDOT:PSS composite films with fluorinated polymer templates

•The patterning method of MWCNT is defined by PFDMA mask in a lift-off process.•Finely defined lines were observed at the edge of the patterned MWCNT films.•PEDOT:PSS, a conducting polymer, does not react with the patterned PFDMA.•MWCNT/PEDOT:PSS films were improved the sheet resistance compared to MWCNT films.•The optimal coating volume of MWCNT/PEDOT:PSS was examined to achieve fine patterns.

This paper reports a micro patterning method for multi-walled carbon nanotubes (MWCNTs), whose patterns were defined by a poly(1H,1H,2H,2H-perfluorodecyl methacrylate) (PFDMA) mask in a lift-off process. The PFDMA layer on the patterned polydimethylsiloxane (PDMS) mold was transferred to a polyethylene naphthalate (PEN) film using a Micro-Contact Printing (μCP) technique. In contrast to conventional photoresist masks, the PFDMA polymer template was not damaged by the solvent used for the MWCNT dispersion, isopropyl alcohol (IPA), which enabled the precise and clean deposition of MWCNTs. Moreover, a hydrofluoroether solvent, which was used to remove the PFDMA template, did not show any signal for chemical interactions with the PEN substrate or poly(3,4-ethylene dioxythiophene):poly(styrene sulfonate) (PEDOT:PSS). This orthogonal character led to the successful lift-off patterning of MWCNTs/PEDOT:PSS composite films. The micro-patterned composite films could be examined further as a thin film heater with a bending radius of 15 mm, generating enough heat to reach a maximum temperature of 53 °C with an applied voltage of 30 V.

Graphical abstractFigure optionsDownload full-size imageDownload as PowerPoint slide