Towards CMOS-compatible single-walled carbon nanotube resonators

We report a totally CMOS-compatible fabrication technique to assemble horizontally suspended single-walled carbon nanotube (SWCNT) resonators. Individual SWCNTs are assembled in parallel at multiple sites by a technique called dielectrophoresis. The mechanical resonance frequencies of the suspended SWCNTs are in the range of 20–35 MHz as determined from the piezoresistive response of the resonators during electrostatic actuation. The resistance of the suspended SWCNT either remains unchanged or increases or decreases significantly as a function of the actuation frequency. This can be explained by the effect the nanotube chirality has on the piezoresistive gauge factor.

Graphical abstractFigure optionsDownload full-size imageDownload as PowerPoint slideHighlights► We report a totally CMOS-compatible fabrication technique to assemble horizontally suspended SWCNT resonators at multiple sites in parallel. ► Electromechanical measurements of the SWCNT resonators demonstrate a significant change in their normalized resistance as a function of the actuation frequency. ► The frequency at which the resistance maximum (or the minimum) is measured could correspond to the mechanical resonance frequency of the suspended SWCNT. ► The piezoresistance effect of SWCNTs could cause the significant change in the normalized resistance at their mechanical resonance frequency.