| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 539389 | Microelectronic Engineering | 2014 | 5 Pages |
•Reliable anti-sticking coatings on nickel surfaces are produced based on perfluoro-alkyl phosphates and -phosphonates.•Oxygen plasma pre-treatment yields 5 nm oxide suitable for layer attachment.•Friction force and contact angle measurements confirm the adapted surface properties.•Stability is demonstrated with repeated nano-imprint cycles and XPS.
Nickel is the preferred material for molds used in high throughput micro injection molding and roll-to-roll processes. We present different solutions for anti-sticking layers for nickel-based nanoreplication tools, which are highly desired for replication of features in the sub-micrometer and nanometer scale. Layers of fluorocarbon molecules, bound to nickel via different head groups, were evaluated via friction force and contact angle measurements, X-ray photoelectron spectroscopy and imprint tests. The robustness of fluorinated phosphates and phosphonates applied to nickel pre-treated in oxygen plasma is similar to silanes used on silicon molds.
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