Article ID Journal Published Year Pages File Type
539406 Microelectronic Engineering 2014 5 Pages PDF
Abstract

•An aperiodic double layer metallic grating is designed.•A subwavelength and long depth of focus focal spot is achieved.•Focusing performance is insensitive to alignment errors between layers.

In this paper, a double-layer aperiodic metallic grating is designed and the focusing performance is numerically researched using the finite-difference time-domain method. A sub-wavelength focusing spot is achieved and the depth of focus is twice the length of the incident wavelength. With its ease of fabrication, the designed aperiodic double-layer metallic grating has great potential in applications such as data storage, laser direct writing and optical probe.

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Physical Sciences and Engineering Computer Science Hardware and Architecture
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