Multi-electron-beam deflector array

•We have designed a multi beam array deflector.•We have modeled the multi beam array deflector.•We have fabricated the multi beam array deflector.

In single electron beam columns the alignment of the beam is obtained either by mechanical shifting the lenses or by x/y alignment deflectors. We are developing multi electron beam columns for electron microscopy and lithography. The problem in multi-beam systems is that mechanical alignment and simple x/y deflectors can only align the total array of beams in the x/y direction and not correct the position of individual beamlets. We present here a simple design, fabrication, electron-optical analysis and experimental results of a multi-beam x/y deflector array that can deflect each beamlet separately. The array is fabricated with micro-fabrication technology with in-plane deflection plates made of molybdenum. The electron optical properties of this in-plane deflector are simulated and compared to a traditional deflector. The experimental measurements are compared with the simulations and are in agreement.

Graphical abstractFigure optionsDownload full-size imageDownload as PowerPoint slide