Electrostatic pick-and-place micro/nanomanipulation under the electron beam

•We demonstrated peak-and-place particle manipulation inside an SEM.•Experiments were performed with Al2O3, WO3 and tungsten micro- and nanoparticles.•The mechanism of manipulation is based on electrostatic interaction under the electron beam.•The dielectrophoretic force pulls the particle whereas the van der Waals force retains it.

Here we present a method of particle pick-and-place manipulation, which is based on electrostatic interaction between objects charged under the beam of a scanning electron microscope. This method allows well-controlled pickup, transport and placement of micro- and nanoparticles as well as visualization of the process and the result of manipulation in real time on electron images. Manipulation of Al2O3, WO3 and tungsten particles under the influence of the electric field proposed by a charged metalized tip was experimentally demonstrated. We also created a theoretical model, which is based on the assumption that the dielectrophoretic force created by the charged metallic tip pulls a particle whereas the van der Waals force retains it on a substrate.

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