| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 539563 | Microelectronic Engineering | 2014 | 4 Pages |
•An innovative nano-scaled electron emitter is presented.•Shrinking down the acceleration area below the mean free path of the electron allows vacuum through scaling.•The electron accelerator consists of an emissive bottom electrode, support structures and an optimized front grid.•Different prototypes were fabricated and the mechanical strength is visually and electrically analyzed.•One possible field of application – ionizing gas detection systems – is illustrated.
This paper discusses the realization of a downscaled electron accelerator. It consists of a bottom electrode, an acceleration area in the deep sub μm-regime and a front grid which is used as electron exit window. After the optimization of the front electrode layout, the basic manufacturing process steps are introduced. Finally electrical measurements of the achievable breakdown voltages are presented.
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