| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 539600 | Microelectronic Engineering | 2011 | 6 Pages |
Abstract
The paper deals with the methodology used to form regular pattern of sputtered thin films LiPON/LiFePO4 material acting respectively as the solid electrolyte and the positive electrode of the lithium ion solid state 3D micro-battery. The micromachining of the silicon periodic nanopillars array (negative electrode of the micro-battery) is also reported. The proposed study clearly demonstrates a breakthrough technology in the field of lithium ion micro-battery as the ecologically friendly LiFePO4 material has never been evaluated as the positive electrode.
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Authors
C. Lethien, M. Zegaoui, P. Roussel, P. Tilmant, N. Rolland, P.A. Rolland,