Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
539677 | Microelectronic Engineering | 2011 | 8 Pages |
Abstract
This paper reports on design, fabrication and experimental testing of one port ZnO contour-mode resonant MEMS. The devices are fabricated from silicon wafers using a 4-mask process. The use of contour modes, whose frequencies are set by lithographically defined dimensions, permits the fabrication of multiple filters at arbitrary frequencies on the same chip. The one port ZnO contour mode resonator is compared with the AlN structure.
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Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
Tadeusz Gryba, Julien Carlier, Shengxiang Wang, XingZhong Zhao, Shishang Guo, Jean-Etienne Lefebvre,