Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
539746 | Microelectronic Engineering | 2010 | 5 Pages |
Abstract
In this article we report the fabrication of Fresnel zone plates (FZP) by recording the interference pattern of converging and diverging spherical waves at extreme ultraviolet wavelength (λ=13.5nm). The spherical waves are generated by two concentric annular parent zone plates. The recorded pattern shows a factor of two reduction in the smallest feature size (outermost zone width) compared to its parent counterparts that generate the spherical waves. FZPs with a zone width down to 16 nm have been recorded with this technique. We also present scanning transmission X-ray microscopy (STXM) results taken with a zone plate with 25 nm outermost zone width.
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Authors
Sankha S. Sarkar, Harun H. Solak, Jörg Raabe, Christian David, J. Friso van der Veen,