| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 539782 | Microelectronic Engineering | 2010 | 4 Pages |
Abstract
In this paper, we present the results of gold nanoparticles fabrication on large area by soft UV nanoimprint lithography (UV-NIL) and lift-off process for antibodies sensing. For this fabrication, the hard polydimethylsiloxane (H-PDMS) is used as flexible mold material. A simple AMONIL/PMMA bilayer is used to transfer patterns by etching the substrate with a suitable RIE process. The UV-NIL process has enabled to obtain gold nanoparticles with a diameter about 160 nm on a zone of 1 mm2. For bioplasmonic applications, the sensing of Anti-Biotin was studied.
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
G. Barbillon, F. Hamouda, S. Held, P. Gogol, B. Bartenlian,