Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
539796 | Microelectronic Engineering | 2010 | 5 Pages |
Abstract
With an increasing use of emerging patterning technologies such as UV-NIL in biotechnological applications there is at the same time a raising demand for new material for such applications. Here we present a PEG based precursor mixed with a photoinitiator to make it UV sensitive as a new material aimed at biotechnological applications. Using HSQ patterned quartz stamps we observed excellent pattern replication indicating good flow properties of the resist. We were able to obtain imprints with <20 nm residual layer. The PEG based resist has hydrogel properties and it swelling in water was observed by AFM.
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Authors
Ainhoa Gaston, Ali Z. Khokhar, Leire Bilbao, Virginia Sáez-Martínez, Ana Corres, Isabel Obieta, Nikolaj Gadegaard,