| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 539806 | Microelectronic Engineering | 2014 | 9 Pages |
•The three dimensional bevel embossing data and graphs simulated are accurate and close to the experimental results.•The three dimensional bevel embossing system has perfect embossing formability and high stability.•Geometric methods were employed to deduce the three dimensional bevel embossing forming mathematical equations.
This study conducted three dimensional bevel embossing forming simulation and forming experiment. Using the columnar array microstructure as the cavity insert, along with the self-developed linear control three dimensional bevel embossing system and UV-curing technology, this study carried out the microstructure three dimensional bevel embossing forming process. First, geometric methods were employed to deduce the three dimensional bevel embossing forming mathematical equations for input into Matlab programming software in order to simulate three dimensional bevel embossing results. Next, three dimensional bevel embossing experiment was conducted to discuss the simulated and experimental microstructure formability and process parameters. The experimental results suggested that, the simulated three dimensional bevel embossing results using forming equations are accurately close to the three dimensional bevel embossing experimental results, and the self-developed linear control three dimensional bevel embossing system has perfect embossing formability and high stability.
Graphical abstractThe different positions of the shapes of imprinting rotation and inclination.Figure optionsDownload full-size imageDownload as PowerPoint slide
