| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 539982 | Microelectronic Engineering | 2013 | 6 Pages |
•NIR photo-polymerization for microtips self-writing on VCSELs is optimized.•Sensitivity to oxygen quenching is controlled thanks to a spin-coating process.•Optimal conditions for collective self-writing on VCSELs are determined.•Tipped-VCSELs emit a focused beam suitable for scanning probe optical microscopy.
We report on the improvement of a fabrication method for micro-optics integration on vertical semiconductor laser diodes (VCSELs). Our approach is based on microlens self-writing by the laser beam itself thanks to self-guided Near-Infra-Red photo-polymerization. Fabrication conditions have been optimized to control and take benefit of process sensitivity to oxygen quenching and to make possible the study of photo-chemical parameters influence on final tip geometry. The interest of this simple method for fabricating focused-beam VCSELs is finally discussed.
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