| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 540046 | Microelectronic Engineering | 2007 | 5 Pages |
Abstract
In this paper, a method will be detailed to optimise the placement of the AF. For the purpose of this study, the diffraction pattern induced by the insertion of one or several AF is analysed in frequency space. This analysis details the evolution of the intensity of even and odd orders during the insertion of AF. The calculation of the optimum placement is detailed, and the DOF resulting from the insertion of one or more AF is also presented.
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
Amandine Borjon, Jérôme Belledent, Yorick Trouiller, Christian Gardin, Christophe Couderc, Yves Rody, Frank Sundermann, Jean-Christophe Urbani, Franck Foussadier, Jonathan Planchot, Emek Yesilada, Patrick Montgomery, Bill Willkinson, Mazen Saied,