Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
540054 | Microelectronic Engineering | 2007 | 5 Pages |
Abstract
Nanoengraving of membranes as a template for nanopores fabrication is an application field of growing interest. Similarly to the formation of ion tracks in membranes created when high-energetic ions pass trough thin foils, it is possible with a FIB system to fabricate, design and organise nanodevices within thin membranes. In this work, we detail the advanced methodology we have carefully optimised for such deep sub-10 nm nanodevices fabrication using our high-performance FIB instrument.
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
J. Gierak, A. Madouri, A.L. Biance, E. Bourhis, G. Patriarche, C. Ulysse, D. Lucot, X. Lafosse, L. Auvray, L. Bruchhaus, R. Jede,