Article ID Journal Published Year Pages File Type
540071 Microelectronic Engineering 2007 5 Pages PDF
Abstract

A process based on nanoimprint lithography is proposed to manufacture linear encoders with a pitch below 1 μm. A phase scale and a read head were manufactured by pattern transfer on silicon and glass, respectively. The process developed points out that this technology may be suitable for mass produced encoders with a very high resolution and/or accuracy in the nanoscale range.

Related Topics
Physical Sciences and Engineering Computer Science Hardware and Architecture
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