| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 540096 | Microelectronic Engineering | 2007 | 5 Pages |
Abstract
Three different setups for automatic demolding in nanoimprint, including air induced demolding and fast and slow demolding, are studied for different stamps designs, and compared with standard manual demolding. A comparison between the setups shows differences in quality between polymers of different molecular weight, and of different grating periods.
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Authors
S. Merino, H. Schift, A. Retolaza, T. Haatainen,