| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 540114 | Microelectronic Engineering | 2007 | 4 Pages |
Abstract
We have preformed finite-difference time-domain (FDTD) analysis of surface-plasmon polaritons (SPPs) interference nanolithography based on end-fire coupling method. The simulated results show the interference of two face-to-face SPPs can fabricate an 80 nm periodicity pattern at the incidence wavelength of 365 nm, which surprisingly has long decay lengths for transverse and longitudinal directions and are insensitive to the focusing and alignment conditions.
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Authors
Xiaowei Guo, Jinglei Du, Xiangang Luo, Chunlei Du, Yongkang Guo,