| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 540227 | Microelectronic Engineering | 2006 | 4 Pages |
Abstract
The etched surfaces show a significant defect density reduction and present a good surface morphology.
Keywords
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
C.F. Pirri, S. Ferrero, L. Scaltrito, D. Perrone, S. De Angelis, M. Mauceri, S. Leone, G. Pistone, G. Abbondanza, D. Crippa,