Article ID Journal Published Year Pages File Type
540256 Microelectronic Engineering 2013 6 Pages PDF
Abstract

This paper presents an innovative method for the laser-assisted chemical liquid phase deposition using Acidithiobacillus ferrooxidans (At. ferrooxidans 13820) culture supernatant. At. ferrooxidans 13820 culture supernatant was used for bioleaching of the copper. The obtained copper solution in this process was then used as deposition precursor for direct writing on substrate surface by laser. The feasibility of copper deposition was studied with a 1064 and 532 nm Nd:YAG laser to form desired patterns. It is observed that there is a positive correlation between the deposition amount and the laser power, scan repetitions and reciprocal of scanning speed, respectively. The choice of the substrate is mainly determined by the application domain including polyimide, Si and SiO2. The effect of substrate on the deposition lines was studied by setting laser source at 532 nm. As compared to other substrates, SiO2 showed better performance of deposition continuity. Better deposition was obtained with less energy consumption, by changing laser source from 1064 to 532 nm. Combining the etching and the laser-guided writing through At. ferrooxidans 13820 culture supernatant provides an innovative and cleaner way of producing metallic microstructures.

Graphical abstractFigure optionsDownload full-size imageDownload as PowerPoint slideHighlights► Acidithiobacillus ferrooxidans supernatant was used for laser-assisted deposition. ► Copper lines were deposited on Si and SiO2 by different lasers. ► This reveals an innovative and cleaner way of producing metallic microstructures.

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