| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 540306 | Microelectronic Engineering | 2012 | 5 Pages |
In this paper, a method is introduced for the realizing precise surface sculpting in the sub-micrometer scale. The method is based on well known surface propagation theory that surface moves its surface normal direction according to Huygens theory. Surface driving forces such as incident ion beam flux and redeposition flux can be controlled such a way that the surface driving speed is controlled at the position of the each pre-sliced layer. In this way any surfaces can be fabricated in the presence of proper conditions; pixel overlap, dwell times and ion beam energy and so on. Experimental demonstration will be presented with predefined free surface as well as fundamental structures. The proposed method can be applied to any material in principle when the sputtering yield and redeposition flux distribution are known.
Graphical abstractFigure optionsDownload full-size imageDownload as PowerPoint slideHighlights► SDM method for the focused ion beam utilized accurate fabrication is developed. ► Sputtering and redeposition flux are considered. ► Predefined curved structures can be fabricated using focused ion beam.
