| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 540325 | Microelectronic Engineering | 2012 | 6 Pages |
Hexagonally arrayed structures of the colloidal crystals with even surface is a good candidate for a master mold of soft lithography. By using high quality and robust 3D colloidal crystal mater mold, we successfully replicate the regular surface structure of colloidal crystal onto polystyrene (PS) thin films via a hot embossing technique, by using soft PDMS molds as a stamp. The replicated 2D patterns show high regular and periodic structures, with few defects over a large area. The periodicity of the patterns can be adjusted by varying the nanoparticle size of colloidal crystal master mold. Various hexagonally arrayed nanostructure patterns can be successfully fabricated, including close-packed and non-close-packed 2D arrays by the structural modification of 3D colloidal crystal templates.
Graphical abstractFigure optionsDownload full-size imageDownload as PowerPoint slideHighlights► PDMS-based hot embossing technique for producing periodically arrayed nanostructures. ► PDMS molds based on 3D colloidal crystals. ► The surface pattern of 3D colloidal crystals can be transferred on a polymer film. ► The replicated 2D patterns showed highly regular and periodic structures. ► The periodicity and morphology of the patterns can be adjusted with ease.
