| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 540594 | Microelectronic Engineering | 2010 | 5 Pages |
Abstract
In this study, we attempt to develop an improved approach for patterning a thin activator by decomposing palladium acetate/acetone layer on nonconductive PI substrates with the second harmonic Q-switched Nd:YAG laser, using acetone instead of toxic chloroform as solvent. In particular, we have established a simple method to identify the decomposition mechanism of palladium acetate.Our developed process can produce copper with high purity and low resistivity achieved by electroless copper deposition on this thin activator.
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Authors
Ya-Huei Chang, Chi-Chao Wan, Yung-Yun Wang,