| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 540604 | Microelectronic Engineering | 2010 | 5 Pages |
Characteristics of BaZrO3 (BZO) modified Sr0.8Bi2.2Ta2O9 (SBT) thin films fabricated by sol–gel method on HfO2 coated Si substrates have been investigated in a metal-ferroelectric-insulator-semiconductor (MFIS) structure for potential use in a ferroelectric field effect transistor (FeFET) type memory. MFIS structures consisting of pure SBT and doped with 5 and 7 mol% BZO exhibited memory windows of 0.81, 0.82 and 0.95 V with gate voltage sweeps between −5 and +5 V, respectively. Leakage current density levels of 10−8 A/cm2 for BZO doped SBT gate materials were observed and attributed to the metallic Bi on the surface as well as intrinsic defects and a porous film microstructure. The higher than expected leakage current is attributed to electron trapping/de-trapping, which reduces the data retention time and memory window. Further process improvements are expected to enhance the electronic properties of doped SBT for FeFET.
