Article ID Journal Published Year Pages File Type
540619 Microelectronic Engineering 2010 6 Pages PDF
Abstract

A technique for the fabrication of chemiresistive sensors using ink-jet printing is reported. Gold nanoparticles stabilised in water were ink-jet printed on gold interdigitated electrodes patterned on an oxidized silicon wafer. As a first step the influence of substrate functionalization, electrode spacing, and nanoparticle density were investigated by electrical measurements and microscopy imaging. Finally a second layer of PHEMA polymer was printed on top of the gold nanoparticle films. The device was exposed to vapours of humidity and ethanol and the obtained results are presented.

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