Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
540747 | Microelectronic Engineering | 2008 | 4 Pages |
Abstract
Lead–magnesium niobate–lead titanate (PMN–PT) thin films with and without the TiO2 seed layer were deposited on Pt/Ti/SiO2/Si substrates through pulsed laser deposition. The study aimed to characterize the effect of the TiO2 seed layer on the phase composition and properties of PMN–PT film. Without the TiO2 seed layer, the pure perovskite phase could be obtained in the thinner PMN–PT film while with the TiO2 seed layer, the pure perovskite phase was formed in the thicker PMN–PT film. The ferroelectric properties of PMN–PT films with the TiO2 seed layer were exhibited. As a result, the maximum amount of remnant polarization reached the amount of 32 μC/cm2 for the PMN–PT thin film with the TiO2 seed layer.
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Authors
J.M. Wang, W.L. Li, C.Q. Liu, W.D. Fei,