Effects of background doping concentration on electrostatic discharge protection of high voltage operating extended drain N-type MOS device

In this study, the effects of background doping concentration (BDC) of a high voltage operating extended drain N-type MOSFET (EDNMOS) device on electrostatic discharge (ESD) protection performances were evaluated. The EDNMOS device with low BDC suffers from strong snapback in the high current region, which results in poor ESD protection performance and high latchup risk. However, the strong snapback can be avoided in the EDNMOS device with high BDC. This implies that both the good ESD protection performance and the latchup immunity can be realized in terms of the EDNMOS by properly controlling its BDC.