Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
540900 | Microelectronic Engineering | 2006 | 4 Pages |
Abstract
Long and stitchingless gratings are printed by means of a read/write head comprising a phase mask illuminated by an intensity modulated laser beam and a reference grating displacement sensor which dictates the modulation period real time. A nearly perfect grating copying is achieved by fixing the sensor grating scale and the written grating substrate on a long platform sliding under the read/write head.
Related Topics
Physical Sciences and Engineering
Computer Science
Hardware and Architecture
Authors
E. Gamet, Y. Jourlin, S. Pelissier, R. Min, S. Reynaud, C. Veillas, J.-C. Pommier, O. Parriaux,