Article ID Journal Published Year Pages File Type
540900 Microelectronic Engineering 2006 4 Pages PDF
Abstract

Long and stitchingless gratings are printed by means of a read/write head comprising a phase mask illuminated by an intensity modulated laser beam and a reference grating displacement sensor which dictates the modulation period real time. A nearly perfect grating copying is achieved by fixing the sensor grating scale and the written grating substrate on a long platform sliding under the read/write head.

Related Topics
Physical Sciences and Engineering Computer Science Hardware and Architecture
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